SGFET GAS SENSOR

专利名称：SGFET GAS SENSOR发明人：SENFT, CHRISTOPH申请号：EP09772113.8申请日：20090625公开号：EP2294390A1公开日：20110316

摘要：A gas sensor (1) has at least one gas-sensitive electrically conductive layer (7)having a surface region (9) which can be brought into contact with the target gas and inwhich the work function depends on the concentration of the target gas in contacttherewith. At least one electrical potential sensor is capacitively coupled to the surfaceregion (9) via an air gap (8). The surface region (9) is structured by means of at least onerecess in which a flat material element (18) which is connected to the gas-sensitive layer(7) in an electrically conductive manner is arranged, the material of said material elementdiffering from that of the gas-sensitive layer (7) and comprising a metal and/or a metal-containing chemical compound.

申请人：MICRONAS HOLDING GMBH

地址：Hans-Bunte-Strasse 19 79108 Freiburg i.Br. DE

国籍：DE

代理机构：Koch, Bertram

更多信息请下载全文后查看