Dielectric barrier discharge lamp and dry cleaning

专利名称：Dielectric barrier discharge lamp and dry

cleaning device using the same

发明人：Sadatoshi Inayoshi申请号：US09750740申请日：20001229公开号：US06628078B2公开日：20030930

专利附图：

摘要：A dry cleaning device which uses a double-cylinder type dielectric barrierdischarge lamp as a ultraviolet source. An outside electrode in a trough-like shape istightly contacted with the outer tube of a discharge container reflecting the ultraviolet

light and directs it toward a workpiece A cover covers the outside electrode forinsulation of the outside electrode from the ozone. In the clearance between the outertube of the discharge container and an Nintroduction tube, an inside electrode in a net-like shape is accommodated, nitrogen (N) gas is caused to flow through the clearance forcooling the lamp

申请人：M.D.COM INC.

代理机构：Ostrolenk, Faber, Gerb & Soffen, LLP

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