Method for controlling handling robot

专利名称：Method for controlling handling robot发明人：Shunsuke Sugimura申请号：US09402397申请日：19991005公开号：US06382902B1公开日：20020507

专利附图：

摘要：A handling robot control method is disclosed for a handling robot disposed in atransfer chamber () having a plurality of process chamber stations () arranged around it incommunication therewith via respective gates (), the robot having a first and a secondcarrier tables () that are deviated in turning angular position from one to the other about

a center of turning, the robot performing an operation to move the first and secondcarrier tables to turn jointly in the transfer chamber and also an operation to move thefirst and second carrier tables individually either to project through a said gate into a saidprocess chamber station or to retract into the transfer chamber. The method comprises:overlapping the operation to move the carrier tables to project and to retract with theoperation to move the first and second carrier tables to turn jointly.

申请人：KOMATSU, LTD

代理机构：Armstrong, Westerman & Hattori, LLP

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