METHODS AND DEVICES FOR MICROELECTROMECHANICAL PRE

专利名称：METHODS AND DEVICES FOR

MICROELECTROMECHANICAL PRESSURESENSORS

发明人：Vamsy Chodavarapu,Adel Merdassi,Charles

Allan

申请号：US14790225申请日：20150702

公开号：US20160002026A1公开日：20160107

专利附图：

摘要：MEMS based sensors, particularly capacitive sensors, potentially can address

critical considerations for users including accuracy, repeatability, long-term stability, easeof calibration, resistance to chemical and physical contaminants, size, packaging, and costeffectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allowfor manufacturability and integration of resonator elements into cavities within the MEMSsensor that are at low pressure allowing high quality factor resonators and absolutepressure sensors to be implemented. Embodiments of the invention provide capacitivesensors and MEMS elements that can be implemented directly above silicon CMOSelectronics.

申请人：The Royal Institution for the Advancement of Learning / McGill University

地址：Montreal CA

国籍：CA

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