Method of calibrating scanners and arrangement for

专利名称：Method of calibrating scanners and

arrangement for producing definedscattered light amplitudes

发明人：Cosmas Malin,Philip Hoyle申请号：US07/527051申请日：19900521公开号：US05108176A公开日：19920428

摘要：Calibration of a light scanner, particularly for measuring particles and surfacefinishes in the inspection of substrates uses a strongly scattering reference medium. Afocused laser beam is directed onto the reference medium which is disposed outside thefocal plane of the beam. Scattered light from the medium is thus defocused with respectto a photodetector that collects the scattered light. An amplifier connected to thephotodetector measures the intensity of the scattered light. By the use of filters in thepath of the light calibration of the optico- electronic system of the scanner is achieved.

申请人：CENSOR AG

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